Overview
DCM-40/60 is a special microscope designed to see if the top and bottom patterns of a wafer are identical with each other. With DCM-40/60, it is possible to uperimpose the two patterns in one view field (usually on monitor screen) for their comparison. Any differences between them can be easily detected, and the amount of difference can be determined by linear gauge & counter. Objectives are available in various magnifications (5X, 10X, 20X, 40X), making DCM-40/60 applicable to a variety of materials. DCM-40 is for wafers of up to 4 inches. DCM-60 is for wafers of up to 6 inches
Features
- Easy alignment of beam axes of upper and lower objectives
- DCM-40/60 can come with various types of stages.
- Comes with C mount as standard. TV monitor observation and photographing are possible. (Both CCD video camera and Digital Camera can be used. Digital Camera adaptor is optional)
- It is possible to observe top or bottom face alone
Specification
| Model | DCM-60 | DCM-40 | |||||||||||||||
| Objectives (To be selected by customer) |
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| Eyepiece | A pair of SUW10X (including Micrometer Reticle) | A pair of UW10X (including Micrometer Reticle) | |||||||||||||||
| Total Magnification | 50X to 400X (Larger Magnifications are available on custom-order basis.) | ||||||||||||||||
| Travel Distance of Upper Objective | 24mm | 30mm | |||||||||||||||
| Travel Distance of Lower Objective | 3mm | 12mm | |||||||||||||||
| Filter | Top:Green / Bottom:Red | ||||||||||||||||
| Stage & Counter | 150 x 150mm Manual Stage KC-12R Counter (1μm reading) | 50 x 50mm Manual Stage, Digital Micrometer (1μm reading) 100 x 100mm Manual Stage, KC-12R Counter (1μm reading) | |||||||||||||||
| Stage Travel | X : 150mm Y : 150mm | X : 50mm Y : 50mm X : 100mm Y : 100mm | |||||||||||||||
| Wafer Holder | Maximum : 6 inches | Maximum : 4 inches | |||||||||||||||
| Holder can be supplied in specially designed shape on custom-order basis. | |||||||||||||||||
| Stage Rotation | 360° | ||||||||||||||||
| Illumination | 150W Halogen Light Guide Illumination | ||||||||||||||||
| Thickness of Material | 20mm or less | 30mm or less | |||||||||||||||
| Type of Calibration Chart | Calibration Chart for Optical Axis Alignment | ||||||||||||||||
Four Simple Steps:
1. Set OPTICAL AXIS switch to Top & Bottom. Align the optical axes of upper and lower objectives with calibration chart.
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2. Place wafer on wafer holder. Set OPTICAL AXIS switch to Top. Focus on the top surface.
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3. Set OPTICAL AXIS switch to Bottom. Focus on the bottom surface.
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4. Set OPTICAL AXIS switch to Top & Bottom. See if the two patterns completely fuse into one image. Determine the amount of dislocation, if any, with linear gauge & counter, or with micrometer reticle of eyepiece.
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